SEM

Electron Optics

Source: Tungsten filament
Voltage: 200 V to 30 kV
Beam current: 10-12 to 10-5 A.
Resolution: 4.5 nm gold particle separation on a carbon substrate at 30 kV and 15mm working distance

Detectors

• Secondary electrons (SE) detector: conventional Everhart-Thornley detector for topographical and stereoscopic imaging.
• Backscattered electrons (BSE) detector: angular solid-state detector for compositional imaging.
• Integral cathodoluminescence (CL) detector for impurities and lattice defect imaging.
• Energy dispersive spectroscopy (EDS) detector for chemical element identification and quantitative analysis. The EDS X-ray system uses LN Oxford thin window detector of 138ev resolution (at Mn) and ISIS software for element analysis down to Boron. The system provides element mapping and line analysis, together with other morphological and chemical image processing capabilities.